NDLI: Characterization of Ultrathin Dielectric Films With the Prism-Coupler Method

Content Provider	IEEE Xplore Digital Library
Author	Kin Seng Chiang Sin Yip Cheng Qing Liu
Copyright Year	1983
Abstract	We demonstrate a technique of applying the prism-coupler method to the characterization of dielectric films that are too thin to support enough guided modes in air for the normal application of the method. The technique is based on applying suitable index-matching liquids on the surface of the thin film to increase the number of effective indexes available for the determination of the refractive index and the thickness of the film. With this technique, even thin films that do not support any guided modes in air can be characterized. We apply the technique to the characterization of polymer thin films as thin as 100-200 nm and discuss its performance and limitation
Sponsorship	IEEE Lasers and Electro-Optics Society Optical Society of America
Starting Page	1206
Ending Page	1212
Page Count	7
File Size	254070
File Format	PDF
ISSN	07338724
Volume Number	25
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-05-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Dielectric films Optical films Optical waveguides Polymer films Optical refraction Optical variables control Dielectric thin films Optical polymers Transistors Polarization thin films optical planar waveguides optical polymers optical waveguides
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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