NDLI: Gimbal-less MEMS two-axis optical scanner array with high fill-factor

Content Provider	IEEE Xplore Digital Library
Author	Tsai, J. Wu, M.C.
Copyright Year	1992
Abstract	In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (>96%), large mechanical scan angles (/spl plusmn/4.4/spl deg/ and /spl plusmn/3.4/spl deg/), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1/spl times/N/sup 2/ wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 /spl mu/m is also achieved. [1496].
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1323
Ending Page	1328
Page Count	6
File Size	561658
File Format	PDF
ISSN	10577157
Volume Number	14
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical arrays Micromechanical devices Mirrors Resonant frequency Optical surface waves Optical switches Springs Two dimensional displays Adaptive arrays Adaptive optics wavelength-selective switches Microelectromechanical devices micromirror array optical components optical fiber switches wavelength division multiplexing (WDM)
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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