NDLI: Arrays of microplasma devices fabricated in photodefinable glass and excited AC or DC by interdigitated electrodes

Content Provider	IEEE Xplore Digital Library
Author	Sung-O Kim Eden, J.G.
Copyright Year	1989
Abstract	Arrays of microplasma devices, fabricated in a photodefinable glass and driven ac or dc by interdigitated electrodes outside the microcavities, have been fabricated and characterized. Operating in the abnormal glow mode for Ne pressures between 200 and 700 Torr and having characteristic cross-sectional dimensions of 75-100 /spl mu/m, the devices are well behaved and arrays as large as 25/spl times/25 pixels have been tested to date. Focused on ease of assembly and minimizing cost, the design of these arrays makes them attractive for structures having emitting areas of hundreds of square centimeters.
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1543
Ending Page	1545
Page Count	3
File Size	274628
File Format	PDF
ISSN	10411135
Volume Number	17
Issue Number	7
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-07-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Glass Electrodes Microcavities Optical films Assembly Plasma confinement Plasma displays Optical refraction Optical variables control Testing microplasma Arrays glass interdigitated
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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Arrays of microplasma devices fabricated in photodefinable glass and excited AC or DC by interdigitated electrodes