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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Seong-Tae Han Jin-Kyu So Kyu-Ha Jang Young-Min Shin Jong-Hyun Kim Suk-Sang Chang Ryskin, N.M. Gun-Sik Park |
| Copyright Year | 1963 |
| Abstract | A vacuum tube oscillator fabricated by the deep etch X-ray lithography: lithographie, galvanoformung, abformung (LIGA) process was successfully developed for the first time. For the proof-of-concept experiment involving a delayed feedback oscillator, a folding-waveguide traveling-wave tube (FWTWT) was fabricated by computer numerical control milling in advance. With a 12.4-kV and 150-mA electron beam, a Ka-band FWTWT amplifier shows a linear gain of 25 dB and a bandwidth of 10%. Applying a delayed feedback scheme, the threshold feedback strengths for the onset of oscillation and for self-modulation were measured to be -30 dB and -16 dB, respectively. The optimum value of the feedback strength for the single-frequency oscillation at 32.5 GHz was about -18 dB with a net electronic efficiency of 6%. The LIGA-fabricated FWTWT circuit was constructed by a lithographic process using the synchrotron X-ray source at the Pohang Light Source. The resulting accuracy and average surface roughness were less than 10 and 1 /spl mu/m, respectively. The LIGA-fabricated Ka-band amplifier shows a linear gain of 15 dB and bandwidth of 1.7% with a 12.4-kV, 47-mA electron beam. The threshold for the onset of oscillation was about -11 dB and the optimum value of feedback strength for a single frequency oscillation at 35 GHz with a net electronic efficiency of 3.5% was about -8 dB. |
| Sponsorship | IEEE Electron Devices Society |
| Starting Page | 702 |
| Ending Page | 708 |
| Page Count | 7 |
| File Size | 1918326 |
| File Format | |
| ISSN | 00189383 |
| Volume Number | 52 |
| Issue Number | 5 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2005-05-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Traveling wave amplifiers Millimeter wave tubes Millimeter wave oscillators Traveling wave tubes Distributed feedback oscillators Waveguide components Etching X-ray lithography lithographie, galvanoformung, abformung (LIGA) Deep etch X-ray lithography delayed feedback oscillator folding–waveguide traveling-wave tube (FWTWT) |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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