NDLI: Electrocapillary piston motion and a prototype of phase-manipulating micromirror

Content Provider	IEEE Xplore Digital Library
Author	Zhi-Liang Wan Feinerman, A. Hong-Jun Zeng Friedman, G.
Copyright Year	1992
Abstract	In this paper, we study the piston motion of a mercury droplet that is confined in a metal-plated microhole. This droplet is actuated by the electrocapillary effect and large displacements of up to 210 /spl mu/m are achieved with very low voltages (/spl sim/2 V). We use a high-speed camera (10,000 frames/s) to capture the piston motion and we find the resonance frequency is /spl sim/50 Hz. The mercury droplet geometry in equilibrium state is analyzed based on Laplace equation and volume conservation. A mathematical model is developed; it predicts that the resonant frequency of mercury droplet is 150 Hz. A prototype of piston-motion micromirror is also demonstrated in the experiment, with a frequency of 400 Hz and amplitude of /spl sim/8 /spl mu/m at 2 V.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	620
Ending Page	627
Page Count	8
File Size	2096378
File Format	PDF
ISSN	10577157
Volume Number	13
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Pistons Prototypes Micromirrors Resonant frequency Low voltage Cameras Motion analysis Resonance Geometry Laplace equations
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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