NDLI: Microfabrication and characterization of teflon AF-coated liquid core waveguide channels in silicon

Content Provider	IEEE Xplore Digital Library
Author	Datta, A. In-Yong Eom Dhar, A. Kuban, P. Manor, R. Ahmad, I. Gangopadhyay, S. Dallas, T. Holtz, M. Temkin, H. Dasgupta, P.K.
Copyright Year	2001
Abstract	The fabrication and testing of Teflon AF-coated channels on silicon and bonding of the same to a similarly coated glass wafer are described. With water or aqueous solutions in such channels, the channels exhibit much better light conduction ability than similar uncoated channels. Although the loss is greater than extruded Teflon AF tubes, light throughput is far superior to channels described in the literature consisting of [110] planes in silicon with 45/spl deg/ sidewalls. Absorbance noise levels under actual flow conditions using an LED source, an inexpensive photodiode and a simple operational amplifier circuitry was 1/spl times/ 10/sup -4/ absorbance units over a 10-mm path length (channel 0.17-mm deep /spl times/0.49-mm wide), comparable to many commercially available macroscale flow-through absorbance detectors. Adherence to Beer's law was tested over a 50-fold concentration range of an injected dye, with the linear r/sup 2/ relating the concentration to the observed absorbance being 0.9993. Fluorescence detection was tested with fluorescein as the test solute, a high brightness blue LED as the excitation source and an inexpensive miniature PMT. The concentration detection limit was 3 /spl times/ 10/sup -9/ M and the corresponding mass detection limit was estimated to be 5 /spl times/ 10 /sup -16/ mol.
Sponsorship	IEEE Sensors Council
Starting Page	788
Ending Page	795
Page Count	8
File Size	471374
File Format	PDF
ISSN	1530437X
Volume Number	3
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Liquid waveguides Silicon Testing Light emitting diodes Fabrication Wafer bonding Glass Throughput Noise level Photodiodes
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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