NDLI: An analytic Volterra-series-based model for a MEMS variable capacitor

Content Provider	IEEE Xplore Digital Library
Author	Innocent, M. Wambacq, P. Donnay, S. Tilmans, H.A.C. Sansen, W. De Man, H.
Copyright Year	1982
Abstract	Microelectromechanical systems (MEMS) components are gradually finding their way in communication applications. To fully understand their behavior in electrical circuits, an interpretable model is required that, in addition, can be simulated efficiently. This paper presents a model for a MEMS variable capacitor (varicap), that can be evaluated much more efficiently and equally accurate during circuit simulation than the differential equations that are normally used to describe this component. The model, based on Volterra series, describes the frequency dependence (e.g., the mechanical resonance) in combination with the nonlinear behavior of the MEMS varicap. The model is simple enough such that it can be interpreted by designers who want to use the MEMS varicap in RF communication circuits.
Sponsorship	IEEE Council on Electronic Design Automation IEEE Circuits and Systems Society
Starting Page	124
Ending Page	131
Page Count	8
File Size	591440
File Format	PDF
ISSN	02780070
Volume Number	22
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Circuit simulation Analytical models Differential equations Frequency dependence Computational modeling Radio frequency Microelectromechanical systems MOS capacitors Tunable circuits and devices
Content Type	Text
Resource Type	Article
Subject	Computer Graphics and Computer-Aided Design Electrical and Electronic Engineering Software

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