NDLI: Impact of capacitor dielectric relaxation on a 14-bit 70-MS/s pipeline ADC in 3-V BiCMOS

Content Provider	IEEE Xplore Digital Library
Author	Zanchi, A. Tsay, F. Papantonopoulos, I.
Copyright Year	1966
Abstract	In this paper, phenomena of charge absorption and relaxation in the plasma enhanced chemical vapor deposition (PECVD) silicon nitride dielectric (Si/sub 3/N/sub 4/) used in the capacitors of a 45-GHz f/sub T/, 0.4-/spl mu/m L/sub min/ SiGe BiCMOS are observed and interpreted. When such capacitors are used to design a pipelined 14-bit 70-MS/s switched-capacitor analog-to-digital converter (ADC), dielectric relaxation is identified as the cause of 8-LSB-wide gaps in the integral nonlinearity, which leads to the degradation of the converter performance even at low frequencies. The effect has been analyzed via Matlab behavioral simulations and SPICE circuit simulations. Ad-hoc experimental tests aimed at detecting residual amounts of charge left in the capacitors as a memory of previous states have been also carried out. After low-density low-pressure chemical vapor deposition (LPCVD) oxide capacitors (SiO/sub 2/) are introduced in the process, a new ADC test chip delivers 72.5-dBFS SNR, 82-dBc SFDR, 11.7-bit ENOB at 70 MS/s and 1-MHz input. The circuit features a die size of 5.3 /spl times/ 5.3 mm/sup 2/ and dissipates 1 W from the 3.3-V supply.
Sponsorship	IEEE Solid-State Circuits Society IEEE Electron Devices Society IEEE Circuits and Systems Society Japan Society of Applied Physics (JSAP) IEEE Microwave Theory and Techniques Society IEEE San Francisco Section Bay Area Council Univ. PA IEEE
Starting Page	2077
Ending Page	2086
Page Count	10
File Size	1321532
File Format	PDF
ISSN	00189200
Volume Number	38
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Capacitors Dielectrics Pipelines BiCMOS integrated circuits Chemical vapor deposition Analog-digital conversion Circuit simulation Circuit testing Absorption Plasma chemistry
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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