NDLI: Substrate-triggered SCR device for on-chip ESD protection in fully silicided sub-0.25-/spl mu/m CMOS process

Content Provider	IEEE Xplore Digital Library
Author	Ming-Dou Ker Kuo-Chun Hsu
Copyright Year	1963
Abstract	The turn-on mechanism of a silicon-controlled rectifier (SCR) device is essentially a current triggering event. While a current is applied to the base or substrate of the SCR device, it can be quickly triggered into its latching state. In this paper, a novel design concept to turn on the SCR device by applying the substrate-triggered technique is first proposed for effective on-chip electrostatic discharge (ESD) protection. This novel substrate-triggered SCR device has the advantages of controllable switching voltage and adjustable holding voltage and is compatible with general CMOS processes without extra process modification such as the silicide-blocking mask and ESD implantation. Moreover, the substrate-triggered SCR devices can be stacked in ESD protection circuits to avoid the transient-induced latch-up issue. The turn-on time of the proposed substrate-triggered SCR devices can be reduced from 27.4 to 7.8 ns by the substrate-triggering technique. The substrate-triggered SCR device with a small active area of only 20 /spl mu/m /spl times/ 20 /spl mu/m can sustain the HBM ESD stress of 6.5 kV in a fully silicided 0.25-/spl mu/m CMOS process.
Sponsorship	IEEE Electron Devices Society
Starting Page	397
Ending Page	405
Page Count	9
File Size	622430
File Format	PDF
ISSN	00189383
Volume Number	50
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Thyristors Electrostatic discharges Protection Integrated circuit reliability CMOS integrated circuits
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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