NDLI: Large-displacement vertical microlens scanner with low driving voltage

Content Provider	IEEE Xplore Digital Library
Author	Kwon, S. Milanovic, V. Lee, L.P.
Copyright Year	1989
Abstract	We have designed, fabricated, and demonstrated large vertical displacement vertical microlens scanners with low (<10 V) driving voltage using silicon-on-insulator technology. The unique isolated and pre-engaged vertical comb-drive sets and the coupled-torsion flexure design provide both upward and downward piston motions, as well as low driving voltages. Single-directional devices demonstrate maximum static downward displacement of 8 /spl mu/m at 10 V/sub dc/. Bidirectional devices demonstrate vertical actuation from -6.5 to +9 /spl mu/m at max 12 V/sub dc/, and a vertical displacement of up to 55 /spl mu/m peak-to-peak is achieved at the resonance near 400 Hz. The lens motion shows piston motion with a small tilt angle of less than 0.034/spl deg/ and the compensation of the tilt using an isolated comb bank is demonstrated.
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1572
Ending Page	1574
Page Count	3
File Size	207400
File Format	PDF
ISSN	10411135
Volume Number	14
Issue Number	11
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-11-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lenses Microoptics Low voltage Actuators Silicon on insulator technology Pistons Optical imaging Micromechanical devices Optical microscopy Stacking
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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