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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Babcock, J.A. Francis, P. Bashir, R. Kabir, A.E. Schroder, D.K. Lee, M.S.L. Dhayagude, T. Yindeepol, W. Prasad, S.J. Kalnitsky, A. Thomas, M.E. Haggag, H. Egan, K. Bergemont, A. Jansen, P. |
| Copyright Year | 1980 |
| Abstract | Precision electrical trimming of stacked Si/SiGe polycrystalline resistors available from the extrinsic base structure of a SiGe BiCMOS technology has been demonstrated for the first time. It is shown that pulse current trimming techniques can be used to trim the poly-SiGe resistors by up to 50% from their original values with accuracy better than /spl plusmn/0.5%. The temperature coefficient of resistance (TCR) is shown to be linearly proportional to the percent change in electrically trimmed poly-SiGe resistance. Finally, we demonstrate resistance cycling using an electrical trim/recovery sequence, indicating that the technique is reversible and is governed by dopant segregation/diffusion mechanisms. The results are consistent with those obtained on conventional polysilicon resistors suggesting that the introduction of a strained SiGe layer does not adversely affect the electrical trim properties of these resistors. |
| Sponsorship | IEEE Electron Devices Society |
| Starting Page | 283 |
| Ending Page | 285 |
| Page Count | 3 |
| File Size | 57311 |
| File Format | |
| ISSN | 07413106 |
| Volume Number | 21 |
| Issue Number | 6 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2000-06-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Resistors Silicon germanium Germanium silicon alloys Electric resistance BiCMOS integrated circuits DH-HEMTs Temperature Solid state circuits Semiconductor thin films Tunable circuits and devices |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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