NDLI: Low-noise MEMS vibration sensor for geophysical applications

Content Provider	IEEE Xplore Digital Library
Author	Bernstein, J. Miller, R. Kelley, W. Ward, P.
Copyright Year	1992
Abstract	The need exists for high-sensitivity, low-noise vibration sensors for various applications, such as geophysical data collection, tracking vehicles, intrusion detectors, and underwater pressure gradient detection. In general, these sensors differ from classical accelerometers in that they require no direct current response, but must have a very low noise floor over a required bandwidth. Theory indicates a capacitive micromachined silicon vibration sensor can have a noise floor on the order of 100 ng//spl radic/Hz over 1 kHz bandwidth, while reducing size and weight tenfold compared to existing magnetic geophones. With early prototypes, we have demonstrated Brownian-limited noise floor at 1.0 /spl mu/g/Hz, orders of magnitude more sensitive than surface micromachined devices such as the industry standard ADXL05.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	433
Ending Page	438
Page Count	6
File Size	296214
File Format	PDF
ISSN	10577157
Volume Number	8
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Underwater tracking Vehicle detection Magnetic noise Bandwidth Underwater vehicles Detectors Accelerometers Silicon Capacitive sensors
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Low-noise CMOS integrated sensing electronics for capacitive MEMS strain sensors

Mechanical noise-limited CMOS-MEMS accelerometers

Electrical modeling of MEMS sensor for integrated accelerometer applications

Evaluation of MEMS inertial sensor module for underwater vehicle navigation application

Integration technology for MEMS automotive sensors

Silicon carbide coated MEMS strain sensor for harsh environment applications

Navigation grade MEMS accelerometer

Total dose effects and SEE screening on MEMS COTS accelerometers

Combined MEMS inertial sensors for IMU applications

Low-noise MEMS vibration sensor for geophysical applications

Similar Documents

Low-noise CMOS integrated sensing electronics for capacitive MEMS strain sensors

Mechanical noise-limited CMOS-MEMS accelerometers

Electrical modeling of MEMS sensor for integrated accelerometer applications

Evaluation of MEMS inertial sensor module for underwater vehicle navigation application

Integration technology for MEMS automotive sensors

Silicon carbide coated MEMS strain sensor for harsh environment applications

Navigation grade MEMS accelerometer

Total dose effects and SEE screening on MEMS COTS accelerometers

Combined MEMS inertial sensors for IMU applications

Low-noise MEMS vibration sensor for geophysical applications