NDLI: Performance evaluation of a micro ultrasonic motor using a one-cubic-millimeter stator

Content Provider	IEEE Xplore Digital Library
Author	Mashimo, T.
Copyright Year	1986
Abstract	A piezoelectric ultrasonic motor has two significant advantages, high energy density and simple structure, and these advantages can help in the miniaturization of the motor. We build a prototype micro ultrasonic motor using a stator with a volume of approximately 1 cubic millimeter. To evaluate its representative performance values (torque, angular velocity, and energy efficiency), we built an experimental setup and operated the prototype motor by varying experimental conditions, such as the preload between the stator and rotor and the amplitude of voltages applied to motor. The performance values obtained at the millimeter to sub-millimeter scale are discussed analytically using the macro scale models of ultrasonic motors. Experimentally, the prototype motor has generated a torque of more than 10 μNm with a 1-cubic-millimeter stator. The motor described herein is now the smallest micro ultrasonic motor with a practical torque, although its efficiency is still low.
Starting Page	1819
Ending Page	1826
Page Count	8
File Size	4226484
File Format	PDF
ISSN	08853010
Volume Number	62
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Torque Stators Acoustics Rotors Angular velocity Friction Prototypes
Content Type	Text
Resource Type	Article
Subject	Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering

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