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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Chong Pei Ho Pitchappa, P. Kropelnicki, P. Jian Wang Yuandong Gu Chengkuo Lee |
| Copyright Year | 1995 |
| Abstract | Free-standing polycrystalline silicon (Si) based photonic crystal (PhC) membranes with etched circular and square holes are developed to display high reflectivity in the mid-infrared (MIR) region. Greater than 90% reflection was measured in the MIR wavelengths around 3.58 μm. By using square air holes in the PhC membrane, the mechanical strength of the polycrystalline Si membrane can be enhanced as square air holes have a lower filling factor of 36% of air holes, compared to 49% in circular air holes while keeping the reflectance around 3.45 μm more than 90%. Such Si PhC membranes offer opportunities for specific applications like filters. To illustrate the feasibility of such devices, simulation works are done by configuring two Si PhC membranes to create a Fabry-Perot interferometer operating in MIR region. The filtered peak shows a full width half maximum of 0.08 nm which corresponds to a quality factor of around 43800, thus demonstrating the possibility of high-resolution applications such as gas sensing and hyperspectral imaging. |
| Sponsorship | IEEE Lasers and Electro-Optics Society |
| Starting Page | 94 |
| Ending Page | 100 |
| Page Count | 7 |
| File Size | 566503 |
| File Format | |
| ISSN | 1077260X |
| Volume Number | 20 |
| Issue Number | 4 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-01-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Silicon Atmospheric modeling Mirrors Photonic band gap Wavelength measurement Cavity resonators Q-factor thin films Fabry–Perot optical properties photonic crystals |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Electrical and Electronic Engineering |
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