NDLI: A Time-Dependent Collisional Sheath Model for Dual-Frequency Capacitively Coupled RF Plasma

Content Provider	IEEE Xplore Digital Library
Author	Rahman, M.T. Dewan, M.N.A. Ahmed, A. Chowdhury, M.R.H.
Copyright Year	1973
Abstract	A time-dependent analytical model for capacitive sheath is developed for describing collisional radio-frequency sheath driven by two sinusoidal sources. In this model, it has been assumed that ion motion and velocity are time varying and sheath is collisional. The time-dependent terms in ion-fluid equations are ignored. Based on the assumption of steplike electron density profile model, analytical expressions for instantaneous sheath motion and sheath potential have been developed. The plasma-sheath motion and sheath potential are compared with a time-dependent model for collisionless and a time-independent model for collisional capacitively coupled plasma.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	17
Ending Page	23
Page Count	7
File Size	243770
File Format	PDF
ISSN	00933813
Volume Number	41
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electric potential Mathematical model Radio frequency Analytical models Plasma density Ions time-dependent model Capacitively coupled plasma (CCP) collisional sheath dual frequency radio-frequency (RF) sheath
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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