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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Hejazi, M. Jadidian, B. Safari, A. |
| Copyright Year | 1986 |
| Abstract | We have studied the effect of deposition parameters on the microstructure, crystallinity, and ferroelectric properties of 0.88(Bi0.5Na0.5)TiO3-0.08(Bi0.5K0.5)TiO3-0.04BaTiO3 thin films grown on SrRuO3-coated SrTiO3 substrates by pulsed laser deposition. The parameters studied were the repetition rates, substrate temperatures, oxygen pressures, and laser energies. It was realized that the films prepared at 800°C, 10 Hz, 400 mtorr, and 1.2 J·cm-2 exhibited the highest ferroelectric properties. The measured remanent polarization, dielectric constant at 1 kHz, and coercive field for this film were about 30 μC·cm-2, 645, and 85 kV·cm-1, respectively. Increasing the oxygen pressure during deposition from 200 to 400 mtorr improved the crystallinity, microstructure, dielectric constant, and polarization of the films. The leakage current and dielectric loss were suppressed at 400 mtorr because of the lower concentration of oxygen vacancies and disappearing pinholes and surface undulations in the film deposited at this pressure. |
| File Size | 1002122 |
| File Format | |
| ISSN | 08853010 |
| Volume Number | 59 |
| Issue Number | 9 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-09-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Films Substrates Pulsed laser deposition Surface treatment Microstructure Surface morphology Plasma temperature |
| Content Type | Text |
| Resource Type | Article |
| Subject | Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering |
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