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Micromachined artificial haircell
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2010 |
| Description | A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support. |
| File Size | 2025514 |
| Page Count | 18 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20100017561 |
| Archival Resource Key | ark:/13960/t19k9b21n |
| Language | English |
| Publisher Date | 2010-02-16 |
| Access Restriction | Open |
| Subject Keyword | Electronics And Electrical Engineering Strain Measurement Patents Sensors Microelectronics Substrates Micromachining Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |