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Micromachined peristaltic pump
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1998 |
| Description | A micromachined pump including a channel formed in a semiconductor substrate by conventional processes such as chemical etching. A number of insulating barriers are established in the substrate parallel to one another and transverse to the channel. The barriers separate a series of electrically conductive strips. An overlying flexible conductive membrane is applied over the channel and conductive strips with an insulating layer separating the conductive strips from the conductive membrane. Application of a sequential voltage to the series of strips pulls the membrane into the channel portion of each successive strip to achieve a pumping action. A particularly desirable arrangement employs a micromachined push-pull dual channel cavity employing two substrates with a single membrane sandwiched between them. |
| File Size | 1222623 |
| Page Count | 20 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080004610 |
| Archival Resource Key | ark:/13960/t8x974v5d |
| Language | English |
| Publisher Date | 1998-01-06 |
| Access Restriction | Open |
| Subject Keyword | Mechanical Engineering Patents Etching Semiconductors Materials Pumps Substrates Micromachining Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
