NDLI: Multi-functional micro electromechanical devices and method of bulk manufacturing same

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Multi-functional micro electromechanical devices and method of bulk manufacturing same

Content Provider	NASA Technical Reports Server (NTRS)
Copyright Year	2004
Description	A method of bulk manufacturing SiC sensors is disclosed and claimed. Materials other than SiC may be used as the substrate material. Sensors requiring that the SiC substrate be pierced are also disclosed and claimed. A process flow reversal is employed whereby the metallization is applied first before the recesses are etched into or through the wafer. Aluminum is deposited on the entire planar surface of the metallization. Photoresist is spun onto the substantially planar surface of the Aluminum which is subsequently masked (and developed and removed). Unwanted Aluminum is etched with aqueous TMAH and subsequently the metallization is dry etched. Photoresist is spun onto the still substantially planar surface of Aluminum and oxide and then masked (and developed and removed) leaving the unimidized photoresist behind. Next, ITO is applied over the still substantially planar surface of Aluminum, oxide and unimidized photoresist. Unimidized and exposed photoresist and ITO directly above it are removed with Acetone. Next, deep reactive ion etching attacks exposed oxide not protected by ITO. Finally, hot phosphoric acid removes the Al and ITO enabling wires to connect with the metallization. The back side of the SiC wafer may be also be etched.
File Size	1703296
Page Count	41
File Format	PDF
Alternate Webpage(s)	http://archive.org/details/NASA_NTRS_Archive_20080007035
Archival Resource Key	ark:/13960/t0sr3tz1m
Language	English
Publisher Date	2004-03-16
Access Restriction	Open
Subject Keyword	Solid-state Physics Microelectromechanical Systems Patents Electromechanical Devices Silicon Carbides Photoresists Etching Manufacturing Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science
Content Type	Text
Resource Type	Patent

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