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Actuator operated microvalves
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2008 |
| Description | An actuator operated microvalve and the method of making same is disclosed and claimed. The microvalve comprises a SiC housing which includes a first lower portion and a second upper portion. The lower portion of the SiC housing includes a passageway therethrough, a microvalve seat, and a moveable SiC diaphragm. The SiC diaphragm includes a centrally located boss and radially extending corrugations which may be sinusoidally shaped. The boss of the SiC diaphragm moves and modulates in a range of positions between a closed position wherein the boss interengages said microvalve seat prohibiting communication of fluid through the passageway and a fully open position when the boss is spaced apart from the seat at its maximum permitting communication of fluid through said passageway. The actuator includes a SiC top plate affixed to the boss of the diaphragm and a first electrode and the second upper portion of the SiC housing further includes a second electrode. |
| File Size | 2044973 |
| Page Count | 37 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20090005802 |
| Archival Resource Key | ark:/13960/t3033tk86 |
| Language | English |
| Publisher Date | 2008-10-21 |
| Access Restriction | Open |
| Subject Keyword | Mechanical Engineering Electrodes Silicon Carbides Actuators Valves Patents Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
