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Silicon micromachined accelerometer/seismometer and method of making the same
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2001 |
| Description | A silicon-based microaccelerometer for seismic application is provided using a low-resonant frequency (10 Hz), large proof mass (1 gram), and high Q suspension to achieve high sensitivity of less than 1 ng with a bandwidth a 0.05 to 50 Hz. The proof mass is cut away from a planar substrate in the form of a disk using abrasive cutting, which disk closely fits but does not touch a surrounding angular frame. The spring of the microaccelerometer between the angular frame and the proof mass is provided from two continuous, 3 microns thick membranes. The fixed capacitive electrodes are provided on separate, subsequently bonded substrates, and movable capacitive plates are provided on the membranes. By fabricating capacitive plates on the separate substrates, the gap between the fixed and movable capacitive plates in the differential capacitive sensor is closely controlled. The use of continuous membranes for the spring produces a shock resistant, robust sensor. |
| File Size | 1019552 |
| Page Count | 16 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080004924 |
| Archival Resource Key | ark:/13960/t92858s9h |
| Language | English |
| Publisher Date | 2001-03-06 |
| Access Restriction | Open |
| Subject Keyword | Accelerometers Patents Sensitivity Resonant Frequencies Micromachining Seismographs Silicon Low Frequencies Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
