Loading...
Please wait, while we are loading the content...
Similar Documents
Miniature micromachined quadrupole mass spectrometer array and method of making the same (Document No: 20080004669)
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2001 |
| Description | The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device. |
| File Size | 1577016 |
| Page Count | 17 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080004669 |
| Archival Resource Key | ark:/13960/t3hx6941v |
| Language | English |
| Publisher Date | 2001-08-28 |
| Access Restriction | Open |
| Subject Keyword | Patents Mass Spectrometers Miniaturization Quadrupoles Micromachining Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
