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Nano-interconnection for microelectronics and polymers with benzo-triazole
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Park, Yeonjoon Kuk, Young Noh, Hyunpil Choi, Sang H. |
| Copyright Year | 2006 |
| Description | Benzo-Triazole (BTA) is considered as an important bridging material that can connect an organic polymer to the metal electrode on silicon wafers as a part of the microelectronics fabrication technology. We report a detailed process of surface induced 3-D polymerization of BTA on the Cu electrode material which was measured with the Ultraviolet Photoemission Spectroscopy (UPS), X-ray Photoemission Spectroscopy (XPS), and Scanning Tunneling Microscope (STM). The electric utilization of shield and chain polymerization of BTA on Cu surface is contemplated in this study. |
| File Size | 1014097 |
| Page Count | 7 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20060009153 |
| Archival Resource Key | ark:/13960/t86h9j12g |
| Language | English |
| Publisher Date | 2006-01-01 |
| Access Restriction | Open |
| Subject Keyword | Electronics And Electrical Engineering Electrodes Fabrication Wafers Ultraviolet Spectroscopy X Ray Spectroscopy Polymerization Electron Microscopes Silicon Microelectronics Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |