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Soft x ray optics by pulsed laser deposition
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Fernandez, Felix E. |
| Copyright Year | 1994 |
| Description | A series of molybdenum thin film depositions by PLD (Pulsed Laser Deposition) have been carried out, seeking appropriate conditions for multilayer fabrication. Green (532 nm) and UV (355 nm) light pulses, in a wide range of fluences, were used. Relatively large fluences (in comparison with Si) are required to cause evaporation of molybdenum. The optical penetration depths and reflectivities for Mo at these two wavelengths are comparable, which means that results should be, and do appear to be similar for equal fluences. For all fluences above threshold used, a large number of incandescent particles is ejected by the target (either a standard Mo sputtering target or a Mo sheet were tried), together with the plasma plume. Most of these particles are clearly seen to bounce off the substrate. The films were observed with light microscopy using Nomarski and darkfield techniques. There is no evidence of large debris. Smooth films plus micron-sized droplets are usually seen. The concentration of these droplets embedded in the film appears not to vary strongly with the laser fluence employed. Additional characterization with SEM and XRD is under way. |
| File Size | 127809 |
| Page Count | 4 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19940020485 |
| Archival Resource Key | ark:/13960/t5fc00c2w |
| Language | English |
| Publisher Date | 1994-01-01 |
| Access Restriction | Open |
| Subject Keyword | Optics Thin Films Laser Plasmas Metal Films Fluence Pulsed Laser Deposition Optical Thickness Molybdenum X Ray Optics Substrates Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
