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Fabrication of micro-optical devices
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Gal, George Purdy, Don Anderson, W. W. Marley, J. |
| Copyright Year | 1993 |
| Description | We have fabricated a variety of micro-optic components including Fresnel and non-Frensel lenses, off-axis and dispersive lenses with binary stepped contours, and analog contours. Process details for all lens designs fabricated are given including multistep photolithography for binary fabrication and grayscale mask photolithography for analog fabrication. Reactive ion etching and ion beam milling are described for the binary fabrication process, while ion beam milling was used for the analog fabrication process. Examples of micro-optic components fabricated in both Si and CdTe substrates are given. |
| File Size | 945313 |
| Page Count | 16 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19940012878 |
| Archival Resource Key | ark:/13960/t09w5c704 |
| Language | English |
| Publisher Date | 1993-08-01 |
| Access Restriction | Open |
| Subject Keyword | Optics Fabrication Fresnel Lenses Cadmium Tellurides Photomasks Optoelectronic Devices Etching Photolithography Ion Beams Lenses Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
