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Diffractive optics fabricated by direct write methods with an electron beam
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Zaleta, David Stein, Robert Kress, Bernard Urquhart Sr., Kris Lee, Sing H. Daschner, Walter |
| Copyright Year | 1993 |
| Description | State-of-the-art diffractive optics are fabricated using e-beam lithography and dry etching techniques to achieve multilevel phase elements with very high diffraction efficiencies. One of the major challenges encountered in fabricating diffractive optics is the small feature size (e.g. for diffractive lenses with small f-number). It is not only the e-beam system which dictates the feature size limitations, but also the alignment systems (mask aligner) and the materials (e-beam and photo resists). In order to allow diffractive optics to be used in new optoelectronic systems, it is necessary not only to fabricate elements with small feature sizes but also to do so in an economical fashion. Since price of a multilevel diffractive optical element is closely related to the e-beam writing time and the number of etching steps, we need to decrease the writing time and etching steps without affecting the quality of the element. To do this one has to utilize the full potentials of the e-beam writing system. In this paper, we will present three diffractive optics fabrication techniques which will reduce the number of process steps, the writing time, and the overall fabrication time for multilevel phase diffractive optics. |
| File Size | 686744 |
| Page Count | 12 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19940012874 |
| Archival Resource Key | ark:/13960/t46q6w15w |
| Language | English |
| Publisher Date | 1993-08-01 |
| Access Restriction | Open |
| Subject Keyword | Optics Fabrication Electron Beams Diffraction Diffractive Optics Optoelectronic Devices Etching Optical Equipment Photolithography Masks Lenses Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
