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Pressure transducer and system for cryogenic environments
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1992 |
| Description | A silicon pressure die is bonded to a borosilicate substrate above the pneumatic port. A Wheatstone bridge circuit is formed on the silicon pressure die and has bridge elements of silicon doped with boron to a deposit density level of approximately 1 x 10(exp 19)-10(exp 21) boron/cc. A current source is provided to excite the Wheatstone bridge circuit. In addition, a temperature sensor is provided to provide temperature readings. An array may be formed of the resulting pressure transducers. This unique solution of materials permits operation of a pressure transducer in cryogenic environments. |
| File Size | 846997 |
| Page Count | 21 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19920019854 |
| Archival Resource Key | ark:/13960/t2k69d18c |
| Language | English |
| Publisher Date | 1992-05-26 |
| Access Restriction | Open |
| Subject Keyword | Pressure Sensors Transducers Circuits Borosilicate Glass Substrates Temperature Sensors Boron Doped Crystals Wheatstone Bridges Cryogenics Silicon Pressure Measurement Pneumatics Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
