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Method of fabricating an imaging x-ray spectrometer
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1986 |
| Description | A process for fabricating an X-ray spectrometer having imaging and energy resolution of X-ray sources is discussed. The spectrometer has an array of adjoinging rectangularly shaped detector cells formed in a silicon body. The walls of the cells are created by laser drilling holes completely through the silicon body and diffusing n(+) phosphorous doping material therethrough. A thermally migrated aluminum electrode is formed centrally through each of the cells. |
| File Size | 461065 |
| Page Count | 6 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19870005238 |
| Archival Resource Key | ark:/13960/t0jt4jg3w |
| Language | English |
| Publisher Date | 1986-10-21 |
| Access Restriction | Open |
| Subject Keyword | Fabrication Solid State Radiation Detectors X Ray Spectroscopy Spectrometers Electromagnetic Radiation X Ray Imagery Silicon Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
