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Dual ion beam deposition of carbon films with diamondlike properties
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Angus, J. C. Swec, D. M. Mirtich, M. J. |
| Copyright Year | 1984 |
| Description | A single and dual ion beam system was used to generate amorphous carbon films with diamond like properties. A methane/argon mixture at a molar ratio of 0.28 was ionized in the low pressure discharge chamber of a 30-cm-diameter ion source. A second ion source, 8 cm in diameter was used to direct a beam of 600 eV Argon ions on the substrates (fused silica or silicon) while the deposition from the 30-cm ion source was taking place. Nuclear reaction and combustion analysis indicate H/C ratios for the films to be 1.00. This high value of H/C, it is felt, allowed the films to have good transmittance. The films were impervious to reagents which dissolve graphitic and polymeric carbon structures. Although the measured density of the films was approximately 1.8 gm/cu cm, a value lower than diamond, the films exhibited other properties that were relatively close to diamond. These films were compared with diamondlike films generated by sputtering a graphite target. |
| File Size | 1743759 |
| Page Count | 21 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19840023442 |
| Archival Resource Key | ark:/13960/t6741md7k |
| Language | English |
| Publisher Date | 1984-01-01 |
| Access Restriction | Open |
| Subject Keyword | Electronics And Electrical Engineering Thin Films Optical Properties Ion Sources Chemical Properties Coatings Adhesion Carbon Transmittance Deposition Sputtering Ion Beams Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
