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Synthesis of silane and silicon in a non-equilibrium plasma jet
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Felder, W. Calcote, H. F. |
| Copyright Year | 1977 |
| Description | The feasibility of using a non-equilibrium hydrogen plasma jet as a chemical synthesis tool was investigated. Four possible processes were identified for further study: (1) production of polycrystalline silicon photovoltaic surfaces, (2) production of SiHCl3 from SiCl4, (3) production of SiH4 from SiHCl3, and (4) purification of SiCl4 by metal impurity nucleation. The most striking result was the recognition that the strongly adhering silicon films, amorphous or polycrystalline, produced in our studies could be the basis for preparing a photovoltaic surface directly; this process has potential advantages over other vapor deposition processes. |
| File Size | 20166023 |
| Page Count | 42 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19780016695 |
| Archival Resource Key | ark:/13960/t09w57q6n |
| Language | English |
| Publisher Date | 1977-12-01 |
| Access Restriction | Open |
| Subject Keyword | Energy Production And Conversion Silanes Plasma Jet Synthesis Silicon Tetrachloride Photovoltaic Cells Chemical Reactions Hydrogen Atoms Silicon Silicon Films Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
