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Monitoring deposition of films
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1973 |
| Description | A system using dual wavelength characteristics of light passing through a film being deposited was described to generate an output signal that changes rapidly at the point when the deposition process should stop or change. Photodetectors are used to sense the light intensity changes at the two wavelengths, and the monitored signal represents the ratio of their sums and difference signal strengths. |
| File Size | 311329 |
| Page Count | 6 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19730018024 |
| Archival Resource Key | ark:/13960/t8bg7fq5s |
| Language | English |
| Publisher Date | 1973-06-05 |
| Access Restriction | Open |
| Subject Keyword | Physics, Solid-state Thin Films Luminous Intensity Signal Generators Wavelengths Deposition Photometers Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
