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Development of chip passivated monolithic complementary misfet circuits with beam leads
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Corrie, B. L. Brouillette, J. W. Kim, M. J. Ragonese, L. J. Warr, R. E. |
| Copyright Year | 1972 |
| Description | Fabrication method is described for alumina passivated silicon MISFET arrays. Technique involves total passivation beam-lead approach and provides completely sealed chip with double level interconnect capability. Refractory metal alloy is used to form interconnect system and obtain metal contacts that withstand temperatures of 873 K for short periods of time. |
| File Size | 99295 |
| Page Count | 2 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19720000695 |
| Archival Resource Key | ark:/13960/t5k97z75b |
| Language | English |
| Publisher Date | 1972-12-01 |
| Access Restriction | Open |
| Subject Keyword | Electronic Components And Circuits Integrated Circuits Beam Leads Platinum Compounds Field Effect Transistors Refractory Metal Alloys Mis Semiconductors Passivity Aluminum Oxides Silicon Dioxide Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
