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Design and Analysis for a Nano-positioning Micro-motion Platform Driven by Piezoelectric Ceramic Linear Motors
| Content Provider | CiteSeerX |
|---|---|
| Author | Yang, Guozhe Lin, Haibo |
| Abstract | Abstract. Micro-EDM provides the potential feasibility for the nano-scale precision machining, and Micro-EDM is suitable for three-dimensional complicated structure processing. A three-dimensional model is conducted in this paper, and the key factors of a platform are analysed in detail, the positioning accuracy of the platform is tested on this basis of the model. The results of the test show that dynamic behavior and stability of this mechanism has many advantages of quick response, smooth, ultra low speed and super resolution etc. High positioning accuracy can be achieved by this platform, so it complies with the requirement of micro-EDM. General With the development of science and technology, the measurement will be changed from micro to nano in the manufacturing field. The enhancement for the precision and ultra precision machining technology improve the machining accuracy of the manufacturing quality, performance and competitiveness. Ultra precision machining technology will be the key progress in the manufacturing field in the next 10-20 years, and its application is significant. So the rapid development of production method can be achieved. The feature of the machining technology is increasingly needed with the development of modern |
| File Format | |
| Access Restriction | Open |
| Content Type | Text |