NDLI: Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

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Proposal of An Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Content Provider	MDPI
Author	Sun, Feng Hao, Yansong Xu, Fangchao Jin, Junjie Li, Qiang Tong, Ling Zhang, Ming Zhang, Xiao You
Copyright Year	2020
Description	Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the 2D micro-positioning platform adopts a nested structure and the displacement magnification mechanism adopts two hourglass displacement magnification mechanisms. The displacement magnification ratio of the hourglass displacement magnification mechanism was studied, and its structural parameters were optimized. Static stiffness analysis and simulation analysis of the micro-positioning platform were carried out. The simulation stiffness of the micro-positioning platform in the XY direction is 46873 N/m and 46832 N/m respectively. The experimental prototype of the micro-positioning platform was built. Through the measurement experiment with the prototype, the maximum stroke of the micro-positioning platform in the XY direction is 489μm and 493μm respectively; the maximum coupling ratio in the XY direction is 2.38% and 2.70% respectively. The research indicates that the micro-positioning platform had the characteristics of small size, equal long stroke, equal stiffness and low coupling ratio in the XY direction.
Starting Page	47
e-ISSN	20760825
DOI	10.3390/act9030047
Journal	Actuators
Issue Number	3
Volume Number	9
Language	English
Publisher	MDPI
Publisher Date	2020-06-29
Access Restriction	Open
Subject Keyword	Actuators Industrial Engineering Manufacturing Engineering Micro-positioning Platform Hourglass Displacement Amplification Mechanism Long Stroke Piezoelectric Actuators Equal Stiffness
Content Type	Text
Resource Type	Article

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