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Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon
| Content Provider | CiteSeerX |
|---|---|
| Author | Hopman, Wico C. L. Ay, Feridun Hu, Wenbin Gadgil, Vishwas J. Kuipers, Laurens Pollnau, Markus Ridder, René M. De |
| Abstract | Abstract: We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated sub-micron diameter holes in silicon. Two optimisation steps were performed. First, we compare two differ-ent FIB scanning procedures and show the advan-tages of using a spiral scanning method for the defi-nition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters such as dwell time, loop number, and ion dose, to determine the optimum FIB milling pa-rameters for reducing the tapering effect. Further-more, we report on the initial results regarding ef-fects of Ga+ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss. |
| File Format | |
| Access Restriction | Open |
| Subject Keyword | Photonic Crystal Structure Ion Beam Milling Strategy Optical Loss Ion Dose Focused Ion Beam Side Wall Angle Photonic Crystal Slab Structure Initial Result Optimum Fib Sub-micron Diameter Hole Spiral Scanning Method Differ-ent Fib Scanning Procedure Decade Reduction Dwell Time Optimisation Step Ga Ion Implantation Loop Number Annealing Step |
| Content Type | Text |
| Resource Type | Article |
