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Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing.
| Content Provider | CiteSeerX |
|---|---|
| Author | Klemmt, Andreas Hielscher, Thomas Horn, Sven Weigert, Gerald |
| Abstract | Scheduling is one of the key factors for semiconductor fab-rication productivity. Objectives like lot cycle time and throughput must be optimized to push the technological development and secure the existence on the rapid growing global market. But especially in the frontend the manufac-turing process is dominated by cluster-tools and reentrance flows which makes a production planning and optimization very hard. The workflow here is mostly controlled only by dispatch rules. To get a further improvement in manufac-turing planning strategies, there is an increasing request of exact or simulation-based solution methods for specified work centers or bottleneck machine groups. One example of this is the semiconductor oven process. Here, complex batch processes with a lot of restrictions have to be sched-uled. A reduction of cycle time in this section by optimized manufacturing strategies has a great influence on all global optimization objectives. Two approaches are investigated in this paper. 1 |
| File Format | |
| Access Restriction | Open |
| Subject Keyword | Semiconductor Oven Process Key Factor Production Planning Optimized Manufacturing Strategy Semiconductor Fab-rication Productivity Global Market Simulation-based Solution Method Manufac-turing Process Specified Work Center Machine Group Technological Development Lot Cycle Time Cycle Time Complex Batch Global Optimization Objective Reentrance Flow Dispatch Rule Great Influence Manufac-turing Planning Strategy |
| Content Type | Text |
