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Parallel-beams/lever electrothermal out-of-plane actuator (2003).
| Content Provider | CiteSeerX |
|---|---|
| Author | Deladi, S. Krijnen, G. Elwenspoek, M. C. |
| Abstract | We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account. |
| File Format | |
| Publisher Date | 2003-01-01 |
| Access Restriction | Open |
| Subject Keyword | Parallel-beams Lever Electrothermal Out-of-plane Actuator Various Mode Temperature Dependence Analytical Calculation Ambient Condition Theoretical Result Polycrystalline Si New Electrothermal Actuator |
| Content Type | Text |