NDLI: Parallel-beamslever electrothermal out-of-plane actuator (2003).

Please wait, while we are loading the content...

Parallel-beamslever electrothermal out-of-plane actuator (2003).

Content Provider	CiteSeerX
Author	Deladi, S. Krijnen, G. Elwenspoek, M. C.
Abstract	We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combiniig numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account. actuators [2] are used to provide in-plane motion (Tx and Ty translations), necessary for kiction and wear tests. With a parallel plate actuator [3] vertical motion is generated in order to bring the test surfaces into contact and to assure a certain range of normal loads needed to study tribological phenomena in different conditions. The force needed to separate the test surfaces can be as large as hundreds of pN because of adhesion due to extremely smooth surfaces [4]. The novel actuator was designed to be able to provide the range of forces and displacements not only to separate test surfaces but also to measure adhesion strength. 1.
File Format	PDF
Publisher Date	2003-01-01
Access Restriction	Open
Subject Keyword	Parallel-beamslever Electrothermal Out-of-plane Actuator Test Surface Parallel Plate Actuator Wear Test Certain Range In-plane Motion Ty Translation Vertical Motion Normal Load Smooth Surface Tribological Phenomenon Various Mode Temperature Dependence Analytical Calculation Ambient Condition Theoretical Result Novel Actuator Different Condition Polycrystalline Si Adhesion Strength New Electrothermal Actuator
Content Type	Text

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in