NDLI: State-of-the-Art Review of Micro Ultrasonic Machining

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Hu, X. Yu, Z. Rajurkar, K. P.
Copyright Year	2006
Abstract	In ultrasonic machining (USM), hard and brittle material is removed by the hammering of abrasive particles excited by ultrasonic vibration delivered to the tool. USM does not significantly alter metallurgical, chemical, or physical properties of work material because of its non-thermal, non-chemical and non-electrical nature. USM has been downscaled to generate micro-scale features in brittle and hard materials such as silicon, quartz, glass and ceramics. Micro holes, slots and 3-D features have been machined. However, the knowledge base for micro USM is far from sufficient to provide instructive rules in applying micro USM to practical manufacturing. This paper presents a systematic literature review and reports the state-of-the-art investigation in micro USM based on previous experimental and theoretical results. Research issues are identified for further improvement of this special micromachining process.
Sponsorship	Manufacturing Engineering Division
Starting Page	1017
Ending Page	1024
Page Count	8
File Format	PDF
ISBN	0791847624
DOI	10.1115/MSEC2006-21118
e-ISBN	0791837868
Volume Number	Manufacturing Science and Engineering, Parts A and B
Conference Proceedings	ASME 2006 International Manufacturing Science and Engineering Conference
Language	English
Publisher Date	2006-10-08
Publisher Place	Ypsilanti, Michigan, USA
Access Restriction	Subscribed
Subject Keyword	Ultrasonic machining Vibration Microscale devices Particulate matter Glass Micromachining Hard materials Silicon Ceramics Manufacturing Brittleness Quartz
Content Type	Text
Resource Type	Article

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