NDLI: A New Approach for the Study of Reliability for MEMS Magnetic Actuator

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A New Approach for the Study of Reliability for MEMS Magnetic Actuator

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Berkcan, E. Chandrasekaran, S.
Copyright Year	2007
Abstract	This paper presents a summary of the design for reliability and the reliability test procedures used for the design, fabrication and testing of a MEMS magnetic actuator. The MEMS device reliability is determined incorporating device structure, its fabrication process, the packaging, & their interacting contributions. The goal of the MEMS actuator reliability design task is to increase the probability of failure free operation of a MEMS based system for a specified time period and the use environment. The design for reliability and the subsequent reliability testing procedures are used to determine the reliability of the MEMS actuator and enable the determination of the reliability of the final product that the MEMS device is becoming part of.
Starting Page	363
Ending Page	366
Page Count	4
File Format	PDF
ISBN	079184305X
DOI	10.1115/IMECE2007-43569
e-ISBN	0791838129
Volume Number	Volume 11: Micro and Nano Systems, Parts A and B
Conference Proceedings	ASME 2007 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2007-11-11
Publisher Place	Seattle, Washington, USA
Access Restriction	Subscribed
Subject Keyword	Microelectromechanical systems Design Actuators Accelerated life testing Packaging Probability Manufacturing Reliability Failure Testing
Content Type	Text
Resource Type	Article

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