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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Shen, S. C. Pan, C. T. Shyu, R. F. Chao, C. H. Huang, J. C. Yeh, C. Y. |
| Copyright Year | 2009 |
| Abstract | Batch-fabrication of eyeball-like spherical micro-lens not only reduces micro assembly cost, but also replaces conventional ball-lenses or costly GRINs (Gradient Reflective Index) without sacrificing performance. Compared to the conventional micro-lenses made in a half-spherical geometry, the eyeball-like micro-lens is a sphere, which allows focusing light in all directions on the substrate surface, thus providing application flexibility for optical applications. The current eyeball-like spherical micro-lens is made using photoresist SU-8. This work develops a batch process at low temperature by spin-coating SU-8 on a surface of silicon wafer. The SU-8 thick film is patterned by UV lithography to form an array of holes for holding eyeball-like spherical micro-lens. The fabrication process employs bulk micromachining to fabricate an array of nozzles on the silicon wafer. Next, this process pours viscous SU-8 into the cavity of silicon wafer and presses it through the nozzle before reflow. The eyeball-like spherical micro-balls form by balancing between surface tension and cohesion. Varying the amount of SU-8 pressed through the nozzle controls the diameter of the balls. This paper designs a pattern with a 3 × 3 lens-array with a numerical aperture of about 0.38. Diameters range from 60 to 500 um. Optical measurements indicate a diameter fluctuation within 3% and an optical insertion loss is below 2.5dB with a wavelength of 635nm in a single-mode fiber (SMF). Therefore the eyeball-like spherical micro-lens is capable of increasing coupling efficiency. |
| Sponsorship | Design Engineering Division and Computers in Engineering Division |
| Starting Page | 511 |
| Ending Page | 517 |
| Page Count | 7 |
| File Format | |
| ISBN | 9780791849002 |
| DOI | 10.1115/DETC2009-86510 |
| e-ISBN | 9780791838563 |
| Volume Number | Volume 3: ASME/IEEE 2009 International Conference on Mechatronic and Embedded Systems and Applications; 20th Reliability, Stress Analysis, and Failure Prevention Conference |
| Conference Proceedings | ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference |
| Language | English |
| Publisher Date | 2009-08-30 |
| Publisher Place | San Diego, California, USA |
| Access Restriction | Subscribed |
| Subject Keyword | Cohesion Micromachining Thick films Semiconductor wafers Wavelength Fibers Geometry Cavities Optical measurement Lenses (optics) Spin coating Nozzles Photoresists Surface tension Manufacturing Photolithography Microassembling Power presses Optical fiber Low temperature |
| Content Type | Text |
| Resource Type | Article |
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