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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Shavezipur, Mohammad Hashemi, Seyed Mohammad Khajepour, Amir |
| Copyright Year | 2007 |
| Abstract | MEMS parallel-plate tunable capacitors are widely used in different areas such as tunable filters, resonators and communications (RF) systems for their simple structures, high Q-factors and small sizes. However, these capacitors have relatively low tuning range (50%) and are subjected to highly sensitive and nonlinear capacitance-voltage (C-V) responses. In this paper novel designs are developed which have C-V responses with high linearity and tunability and low sensitivity. The designs use the flexibility of the moving plates. The plate is segmented to provide a controllable flexibility. Segments are connected together at end nodes by torsional springs. Under each node there is a step which limits the vertical movement of that node. An optimization program finds the best set of step heights that provides the highest linearity. Two numerical examples of three-segmented- and six-segmented-plate capacitors verify that the segmentation of moving plate can considerably improve the linearity without decreasing the conventional tunability. A two-segmented-plate capacitor is then designed for standard processes which cannot fabricate steps of different heights. The new design uses a flexible step (spring) under middle node. The simulation of a capacitor with flexible middle step, designed for PolyMUMPs process, demonstrates a C-V response with high tunability and linearity and low sensitivity. |
| Sponsorship | Design Engineering Division and Computers and Information in Engineering Division |
| Starting Page | 949 |
| Ending Page | 955 |
| Page Count | 7 |
| File Format | |
| ISBN | 0791848043 |
| DOI | 10.1115/DETC2007-35908 |
| e-ISBN | 0791838064 |
| Volume Number | Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- and Nanosystems; and 9th International Conference on Advanced Vehicle Tire Technologies, Parts A and B |
| Conference Proceedings | ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference |
| Language | English |
| Publisher Date | 2007-09-04 |
| Publisher Place | Las Vegas, Nevada, USA |
| Access Restriction | Subscribed |
| Subject Keyword | Microelectromechanical systems Design Q-factor Image segmentation Filters Simulation Capacitors Plates (structures) Capacitance Flexible structures Springs Optimization |
| Content Type | Text |
| Resource Type | Article |
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