NDLI: Subharmonic Excitation for Electrically Actuated Microbeams

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Ali, H. Nayfeh Mohammad, I. Younis
Copyright Year	2005
Abstract	We present analysis of the global dynamics of electrically actuated microbeams under subharmonic excitation. The microbeams are excited by a DC electrostatic force and an AC harmonic force with a frequency tuned near twice their fundamental natural frequencies. We show that the dynamic pull-in instability can occur in this case for an electric load much lower than that predicted with static analysis and the same order-of-magnitude as that predicted in the case of primary-resonance excitation. We show that, once the subharmonic resonance is activated, all frequency-response curves reach pull-in, regardless of the magnitude of the AC forcing. Our results show a limited influence of the quality factor on the frequency response. This result and the fact that the frequency-response curves have very steep passband-to-stopband transitions make the combination of a DC voltage and a subhormonic of order one-half a promising candidate for designing improved high-sensitive RF MEMS filters.
Sponsorship	Design Engineering Division and Computers and Information in Engineering Division
Starting Page	391
Ending Page	396
Page Count	6
File Format	PDF
ISBN	0791847381
DOI	10.1115/DETC2005-84144
e-ISBN	0791837661
Volume Number	Volume 1: 20th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C
Conference Proceedings	ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Language	English
Publisher Date	2005-09-24
Publisher Place	Long Beach, California, USA
Access Restriction	Subscribed
Subject Keyword	Design Microelectromechanical systems Q-factor Microbeams Filters Dynamics (mechanics) Electric load Frequency response Resonance Excitation
Content Type	Text
Resource Type	Article

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