NDLI: An integrated approach to piezoactuator positioning in high-speed atomic force microscope imaging.

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An integrated approach to piezoactuator positioning in high-speed atomic force microscope imaging.

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An integrated approach to piezoactuator positioning in high-speed atomic force microscope imaging.

Content Provider	World Health Organization (WHO)-Global Index Medicus
Author	Su, Chanmin Yan, Yan Wu, Ying Zou, Qingze
Description	Country affiliation: United States Author Affiliation: Yan Y ( 2025 Black Eng. Bldg., Department of Mechanical Engineering, Iowa State University, Ames, Iowa 50011, USA. yanyan@iastate.edu)
Abstract	In this paper, an integrated approach to achieve high-speed atomic force microscope (AFM) imaging of large-size samples is proposed, which combines the enhanced inversion-based iterative control technique to drive the piezotube actuator control for lateral x-y axis positioning with the use of a dual-stage piezoactuator for vertical z-axis positioning. High-speed, large-size AFM imaging is challenging because in high-speed lateral scanning of the AFM imaging at large size, large positioning error of the AFM probe relative to the sample can be generated due to the adverse effects--the nonlinear hysteresis and the vibrational dynamics of the piezotube actuator. In addition, vertical precision positioning of the AFM probe is even more challenging (than the lateral scanning) because the desired trajectory (i.e., the sample topography profile) is unknown in general, and the probe positioning is also effected by and sensitive to the probe-sample interaction. The main contribution of this article is the development of an integrated approach that combines advanced control algorithm with an advanced hardware platform. The proposed approach is demonstrated in experiments by imaging a large-size (50 microm) calibration sample at high-speed (50 Hz scan rate).
ISSN	00346748
Issue Number	7
Journal	Review of Scientific Instruments
Volume Number	79
e-ISSN	10897623
Language	English
Publisher	American Institute of Physics
Publisher Date	2008-07-01
Publisher Place	United States
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Discipline Physics Discipline Chemistry
Content Type	Text
Resource Type	Article
Subject	Medicine Instrumentation

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