NDLI: Analytic determination of the dielectric function of InSb at energies from 0.74 to 6.42 eV at temperatures from 31 to 675 K

Content Provider	Springer Nature Link
Author	Byun, Jun Seok Park, Jae Chan Kim, Tae Jung Kim, Young Dong Kang, Yu Ri Choi, Junho Park, Han Gyeol
Copyright Year	2014
Abstract	Dielectric functions as analytic functions of temperature are useful for nondestructive in-situ monitoring of material deposition and for device design. We present an analytic expression that accurately represents the dielectric function ɛ = ɛ $_{1}$ + iɛ $_{2}$ of InSb at energies from 0.74 to 6.42 eV for temperatures from 31 to 675 K. The original e spectra were obtained by using rotating-compensator spectroscopic ellipsometry. We used the parametric model (PM), which can accommodate the asymmetric nature of critical-point features. The InSb data are successfully reconstructed with nine PM components and yield e as a continuous function of both energy and temperature within the limits given above. Our results should be useful in a number of contexts, including device design and in-situ monitoring of deposition. A representative deposition example is discussed.
Starting Page	1872
Ending Page	1877
Page Count	6
File Format	PDF
ISSN	03744884
Journal	Journal of the Korean Physical Society
Volume Number	64
Issue Number	12
e-ISSN	19768524
Language	English
Publisher	The Korean Physical Society
Publisher Date	2014-07-11
Publisher Place	Seoul
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Dielectric function InSb Theoretical, Mathematical and Computational Physics Parametric model Physics Particle and Nuclear Physics Ellipsometry
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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