NDLI: Thermally stable AuBe-based ohmic contacts to p-type GaP for AlGaInP-based light-emitting diode by using a tungsten barrier layer

Content Provider	Springer Nature Link
Author	Seong, Tae Yeon Park, Jae Seong Kim, Dae Hyun Kang, Daesung
Copyright Year	2016
Abstract	We investigated how a tungsten diffusion barrier layer affected the electrical properties of AuBe/Au contacts to a p-GaP window layer (n$_{a}$ = 5 × 10$^{19}$ cm$^{−3}$) for an AlGaInP-based light emitting diode. All of the as-deposited samples were ohmic. After annealing at 500 °C, the AuBe/Au contacts were electrically degraded with a specific contact resistivity of 1.0 × 10$^{−4}$ Ωcm$^{2}$. However, the electrical properties of the W-based contacts were improved, having a contact resistivity of 5.0 × 10$^{−6}$ Ωcm$^{2}$. The X-ray photoemission spectroscopy (XPS) results showed that the Ga 2p core level for the annealed AuBe/Au contacts shifted to the high binding-energy side. On the other hand, that for the AuBe/W/Au contacts shifted toward the lower binding-energy side. For the AuBe/Au contacts, both Be and P atoms were shown to be outdiffused into the metal contact after annealing. However, for the AuBe/W/Au contacts, the outdiffusion of Be atoms was prevented by the W barrier layer, and the Be atoms were indiffused into GaP. Based on the X-ray photoemission spectroscopy (XPS), Auger electron spectroscopy (AES), and electrical results, the annealing-induced electrical degradation and improvement are described and discussed.
Starting Page	306
Ending Page	310
Page Count	5
File Format	PDF
ISSN	03744884
Journal	Journal of the Korean Physical Society
Volume Number	68
Issue Number	2
e-ISSN	19768524
Language	English
Publisher	The Korean Physical Society
Publisher Date	2016-02-02
Publisher Place	Seoul
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	W diffusion barrier Theoretical, Mathematical and Computational Physics GaP AuBe Light-emitting diodes Physics Particle and Nuclear Physics Contact
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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