NDLI: Post-annealing effects on the physical and optical waveguiding properties of RF sputtered ZnO thin films

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Post-annealing effects on the physical and optical waveguiding properties of RF sputtered ZnO thin films

Content Provider	Springer Nature Link
Author	Meriche, Faiza Touam, Tahar Chelouche, Azeddine Dehimi, Mohamed Solard, Jeanne Fischer, Alexis Boudrioua, Azzedine Peng, Lung Han
Copyright Year	2015
Abstract	ZnO thin films were deposited at room temperature onto glass substrate by RF sputtering technique. Effects of the post-annealing at 300–500°C on the structural, morphological, optical and waveguiding properties were investigated using different characterization techniques. X-ray diffraction (XRD) analyses have shown that all thin films have a hexagonal wurtzite structure with higher c-axis preferred orientation (002), better crystallinity and larger crystallite size as post-annealing temperature increases. Fourier transform infrared (FTIR) spectra of annealed samples confirmed that the ZnO stretching vibration bond was found to be stable at 419 cm$^{−1}$. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images have revealed that film morphology and surface roughness were influenced by heat treatment temperatures. The UV-Vis-NIR spectrophotometry characterisations have indicated that all the films were highly transparent with average transmittance exceeding 81% within the visible region, and the bandgap energy of the as-deposited film was increased with increasing of the annealing temperature.The obtained results from m-lines spectroscopy (MLS) measurements at 632.8 nm wavelength have demonstrated that all ZnO thin film optical waveguides were single mode and the ordinary and extraordinary refractive index values of the film annealed at 500°C were very close to the corresponding ZnO single-crystal values.
Starting Page	862
Ending Page	870
Page Count	9
File Format	PDF
ISSN	17388090
Journal	Electronic Materials Letters
Volume Number	11
Issue Number	5
e-ISSN	20936788
Language	English
Publisher	The Korean Institute of Metals and Materials
Publisher Date	2015-09-10
Publisher Place	Seoul
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	zinc oxide thin film RF-sputtering structure and morphology optical waveguiding properties photonic device applications Optical and Electronic Materials Condensed Matter Physics Nanotechnology and Microengineering Characterization and Evaluation of Materials Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials

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