NDLI: Simulation of RF plasma flowing at low pressure

Content Provider	Springer Nature Link
Author	Zheltukhin, V. S. Shemakhin, A. Yu.
Copyright Year	2014
Abstract	A mathematical model that describes RF plasma flowing at a pressure of 13.3–133 Pa and a Knudsen number of 8 × 10$^{−3}$ ≤ Kn ≤ 7 × 10$^{−2}$ for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given.
Starting Page	101
Ending Page	107
Page Count	7
File Format	PDF
ISSN	20700482
Journal	Mathematical Models and Computer Simulations
Volume Number	6
Issue Number	1
e-ISSN	20700490
Language	English
Publisher	Springer US
Publisher Date	2014-02-01
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	simulation radio-frequency plasma low pressure jet flow transient mode Monte-Carlo method statistical simulation Mathematical Modeling and Industrial Mathematics Simulation and Modeling
Content Type	Text
Resource Type	Article
Subject	Modeling and Simulation Computational Mathematics

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Simulation of RF plasma flowing at low pressure