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| Content Provider | Springer Nature Link |
|---|---|
| Author | Lee, Won Young Kim, Jang Gil Chu, Chong Nam |
| Copyright Year | 2015 |
| Abstract | In this study, a novel process for fabricating micro Al$_{2}$O$_{3}$ patterns using local anodization is proposed. On the basis of double layer theory, the anodizing region was localized on an aluminum surface near a micro tool electrode with a small inter-electrode gap. The localized oxide formation process was observed by field emission scanning electron microscope (FE-SEM) including energy dispersive spectroscopy (EDS). It was confirmed that micro-scale localized aluminum oxide was fabricated on the aluminum surface. Features of the anodized oxide line were investigated using different ratios of sulfuric and oxalic acid mixtures at various pulse durations and voltage conditions. The experimental results show that an insulating aluminum oxide line pattern was fabricated on 10 µm aluminum foil. Subsequently, a coplanar waveguide (CPW) micro patch antenna was fabricated and characterized by a PNA network analyzer. The local anodization can be used for fabricating micro-electric circuits without masks and substrate; which will promise the next generation of micro electronic devices. |
| Starting Page | 2623 |
| Ending Page | 2630 |
| Page Count | 8 |
| File Format | |
| ISSN | 22347593 |
| Journal | International Journal of Precision Engineering and Manufacturing |
| Volume Number | 16 |
| Issue Number | 13 |
| e-ISSN | 20054602 |
| Language | English |
| Publisher | Korean Society for Precision Engineering |
| Publisher Date | 2015-12-08 |
| Publisher Place | Seoul |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | Local anodization Local anodic oxidation Aluminum oxide Radio frequency antenna Industrial and Production Engineering Materials Science |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Mechanical Engineering Electrical and Electronic Engineering |
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