NDLI: Analysis of pressure distribution and verification of pressure signal by changes load and velocity in chemical mechanical polishing

Content Provider	Springer Nature Link
Author	Lee, Changsuk Park, Jaehong Kinoshita, Masaharu Jeong, Haedo
Copyright Year	2015
Abstract	The Preston's equation which was known as the governing equation of the polishing results in CMP process is caused by the wafer pressure and velocity. It is very important for the pressure and velocity to examine the fundamental characteristics which have effects on the polishing results. In this study, the intelligent pad which can measure the pressure distribution delivered to the wafer by the independent change of the pressure and velocity in real-time was used. The intelligent pad has sheet shape of embedded pressure sensor and functions of pressure signal processing, saving and transmitting in real-time. The average and the deviation of pressure signals were calculated by extracting the signal value from the measured pressure distribution, and the quantitative analysis was conducted by using the full width at half maximum (FWHM) value of the probability density function. The suitability of pressure signal was confirmed by polishing the oxide wafer in the same experiment conditions. So, the average and deviation of the pressure signal value correspond with the material removal rate (MRR) and non-uniformity of the polishing result. In conclusion, the intelligent pad system will be a good monitoring tool to understand various phenomena in CMP process.
Starting Page	1061
Ending Page	1066
Page Count	6
File Format	PDF
ISSN	22347593
Journal	International Journal of Precision Engineering and Manufacturing
Volume Number	16
Issue Number	6
e-ISSN	20054602
Language	English
Publisher	Korean Society for Precision Engineering
Publisher Date	2015-06-09
Publisher Place	Seoul
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Intelligent pad Monitoring system Pressure distribution Pressure signal Polishing condition Chemical mechanical polishing Industrial and Production Engineering Materials Science
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Mechanical Engineering Electrical and Electronic Engineering

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